Renishaw has launched a new family of laser interferometer encoder systems at its New Mills operation, introducing technology designed to give semiconductor manufacturers greater precision, easier servicing and more flexible integration.
The Stroud-based engineering technology company’s new range comprises the RLE100, RLE200 and RLE300. The systems provide precision position feedback for motion-control applications used in semiconductor manufacturing, where shrinking device feature sizes are increasing the demand for accuracy, stability and productivity.
The new RLE family is due to be showcased at SEMICON Taiwan 2026 and SEMICON West 2026. It builds on the technology platforms of Renishaw’s established RLE10 and RLE20 laser encoders, while offering an upgrade route for equipment manufacturers without requiring a complete machine redesign.
Three systems for different manufacturing requirements
The RLE100 is the direct successor to the RLE10 and offers equivalent measurement performance, including laser frequency stability, for in-air applications. The RLE200 replaces the RLE20 as the recommended option for higher-performance applications, particularly those operating in vacuum environments. It also introduces automatic Sub-Divisional Error correction.
At the top of the range, the RLE300 is intended for the most demanding semiconductor manufacturing applications. Renishaw says enhanced frequency stability, reduced electronic noise and automatic Sub-Divisional Error correction allow it to achieve measurement uncertainty down to ±0.2 nm.
That performance is aimed at environments requiring highly reliable position feedback, including high-precision, thermally critical and ultra-stable settings. The systems’ operating range has also been doubled to an angular range of ±400 µrad and a linear range of 2 metres.
Modular design aims to simplify maintenance
A key feature of the new range is its modular plug-and-play architecture. Laser units, detector heads and fibre assemblies can be replaced independently, which Renishaw says could reduce maintenance overheads and simplify inventory management.
Detachable optical fibres allow laser units to be replaced without disturbing installed fibres or detector heads. The company says this should enable faster servicing without lengthy realignment procedures.
The encoders also include enhanced diagnostics and condition-monitoring functions. Through an integrated diagnostic interface, users can access real-time information including signal quality, operating status and fault reporting. The stated aim is to support predictive maintenance and help maximise machine uptime.
The new systems are compatible with existing mechanical mounting arrangements, allowing customers to upgrade with minimal disruption and without redesigning their machines. Other changes include a redesigned beam-steering mechanism for simpler beam alignment, improved clean-room compatibility and new detector-head options to support higher stage velocities.
Renishaw sets out upgrade path
Dr Costantino Corbari, Renishaw’s Laser Encoder Design Manager, said the family had been developed to give semiconductor equipment manufacturers a straightforward upgrade path from existing systems.
“Renishaw’s new RLE laser encoder family has been developed to give semiconductor equipment manufacturers a straightforward upgrade path from existing systems while providing the enhanced performance, serviceability and flexibility needed for future generations of precision motion platforms,” said Dr Costantino Corbari, Laser Encoder Design Manager at Renishaw.
He added that the range runs from the drop-in replacement capabilities of the RLE100 and RLE200 to the ultra-high performance of the RLE300, with the aim of helping customers achieve greater precision with less complexity.
Further information about the next generation of RLE laser interferometer encoders is available through Renishaw’s laser encoder website.